Unfortunately I have removed Temp folder.This is the log after retrying the installation:
!SESSION 2014-01-15 20:57:11.237 -----------------------------------------------
eclipse.buildId=4.3.0.M20130911-1000
java.version=1.6.0_13
java.vendor=Sun Microsystems Inc.
BootLoader constants: OS=win32, ARCH=x86, WS=win32, NL=pl_PL
Framework arguments: -product org.eclipse.epp.package.cpp.product -application com.ti.common.core.initialize -ccs.profileTag Installed Code Composer Studio 6.0.0.00091
Command-line arguments: -os win32 -ws win32 -arch x86 -product org.eclipse.epp.package.cpp.product -application com.ti.common.core.initialize -data E:/Documents and Settings/PS/Ustawienia lokalne/Temp/ccs_c68f3cef-3edc-4248-5dec-61e85f919a3b/workspace -ccs.profileTag Installed Code Composer Studio 6.0.0.00091
!ENTRY org.eclipse.core.jobs 4 2 2014-01-15 20:57:33.159
!MESSAGE An internal error occurred during: "CrashTrackerJob".
!STACK 0
java.nio.BufferOverflowException
at java.nio.charset.CoderResult.throwException(Unknown Source)
at java.lang.StringCoding$StringEncoder.encode(Unknown Source)
at java.lang.StringCoding.encode(Unknown Source)
at java.lang.String.getBytes(Unknown Source)
at java.lang.ClassLoader$NativeLibrary.load(Native Method)
at java.lang.ClassLoader.loadLibrary0(Unknown Source)
at java.lang.ClassLoader.loadLibrary(Unknown Source)
at java.lang.Runtime.load0(Unknown Source)
at java.lang.System.load(Unknown Source)
at com.ti.debug.engine.xpcom.Runtime.getFSUtil(Runtime.java:46)
at com.ti.utility.filesystem.DirectoryService.<init>(DirectoryService.java:21)
at com.ti.utility.filesystem.DirectoryService.instance(DirectoryService.java:33)
at com.ti.ccstudio.debug.server.DebugServerPlugin$1.run(DebugServerPlugin.java:117)
at org.eclipse.core.internal.jobs.Worker.run(Worker.java:53)